Microlithography in midlife crisisAUSSCHNITT, C. P.Microelectronic engineering. 1998, Vol 41-42, pp 41-46, issn 0167-9317Conference Paper

Advanced DUV photolithography in a pilot line environment : Optical lithographyAUSSCHNITT, C. P; THOMAS, A. C; WILTSHIRE, T. J et al.IBM journal of research and development. 1997, Vol 41, Num 1-2, pp 21-37, issn 0018-8646Article

Blossom overlay metrology implementationAUSSCHNITT, C. P; CHU, W; FINK, H et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65180G.1-65180G.6, issn 0277-786X, isbn 978-0-8194-6637-2Conference Paper

Focus and dose characterization of immersion photoclustersBRUNNER, T. A; CORLISS, D; WILTSHIRE, T et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7274, issn 0277-786X, isbn 978-0-8194-7527-5 0-8194-7527-0, 72740S.1-72740S.8, 2Conference Paper

Multi-layer overlay metrologyAUSSCHNITT, C. P; MORNINGSTAR, J; MUTH, W et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6195-4, 2Vol, vol 1, 615210.1-615210.10Conference Paper

Multi-Patterning Overlay ControlAUSSCHNITT, C. P; DASARI, P.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692448.1-692448.5, issn 0277-786X, isbn 978-0-8194-7109-3Conference Paper

Laser bandwidth and other sources of focus blur in lithographyBRUNNER, T; CORLISS, D; BUTT, S et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6197-0, vol 1, 61540V.1-61540V.8Conference Paper

Layout optimization for multilayer overlay targetsBINNS, L. A; SMITH, N. P; AUSSCHNITT, C. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61550F.1-61550F.8, issn 0277-786X, isbn 0-8194-6198-9, 1VolConference Paper

Process window metrologyAUSSCHNITT, C. P; CHU, W; HADEL, L et al.SPIE proceedings series. 2000, pp 158-166, isbn 0-8194-3616-XConference Paper

Overlay metrology tool calibrationBINNS, L. A; DASARI, P; SMITH, N. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65180I.1-65180I.9, issn 0277-786X, isbn 978-0-8194-6637-2Conference Paper

Process monitor gratingsBRUNNER, T. A; AUSSCHNITT, C. P.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 651803.1-651803.9, issn 0277-786X, isbn 978-0-8194-6637-2Conference Paper

Seeing the forest for the trees: a new approach to CD controlAUSSCHNITT, C. P; LAGUS, M. E.SPIE proceedings series. 1998, pp 212-220, isbn 0-8194-2777-2Conference Paper